JSM-7400F high resolution scanning electron microscope
Applications:
XEDS, high resolution imaging with SEI, BSE, r-filter, and gentle beam imaging modes to provide compositional and/or topographical information
Accelerating Voltage:
100V to 30kV
Filament:
Cold field emitter
Resolution:
1 nm at 15 kV or 1.5 nm at 1 kV
XEDS System:
Ultra-thin window Si-Li X-ray detector (active area = 30 mm2) capable of detecting elements with Z > 4
Oxford detector with Oxford acquisition software
